March OSSC Meeting: Optical Metrology, Zygo
Category
OSSC Regular Meeting
Registration Info
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About this event
As optical component and system performance requirements continue to increase there is more
dependence on the metrology used to quantify critical requirements. There is an increased demand for improved measurement traceability, environmental robustness, and reduced measurement uncertainty.
This presentation will focus on new solutions recently implemented by Zygo Corporation that enable optimum surface form metrology across a wide range of operating conditions. The presentation will include topics such as full area calibration of optical reference surfaces and surface form metrology in environments prone to vibration and air turbulence.
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